| 摘要 |
PURPOSE:To detect the markers in the part shaded by markers by detecting a 1st mark area by synthesis with the 2nd mark area detection signals existing in the 1st mark area. CONSTITUTION:The mark assigned on an original via a CCD, etc., is detected by optical scanning and is processed in the mark area detections section constituted of the 1st mark area detecting section and the 2nd mark area detecting section. The 1st mark area is detected with good accuracy by the synthesis of the detection signals by the 1st mark outer and inner position detecting sections 151, 160, the 1st mark outer, inner and inner area detecting sections 152, 161 and the detection signals by the 2nd mark outer and inner area detecting sections 155, 164 of the 2nd mark existing on the inner side of the 1st mark by the 2nd mark area detecting section in the 1st mark area detecting section. The marks are detected without erroneous detection of double circular marks, etc., even if the marks exists in recessed parts when the marks are recessed. |
