发明名称 OXIDE SUPERCONDUCTING THIN FILM
摘要 PURPOSE:To reduce the adverse effect due to the interface diffusion of the elements constituting a substrate and to provide a high-quality oxide superconducting thin film by using a Y2O3 single crystal as the substrate for forming an LnBaCuO-based oxide superconducting thin film. CONSTITUTION:An LnBaCuO-based oxide superconducting thin film is formed on a Y2O3 single crystal. In the formula, Ln 19 rare-earth elements including Y. Since Y2O3 consists only of Y and O, the Y2O3 is a part of the elements constituting the LnBaCuO-based superconducting thin film. Accordingly, the thin film is not adversely affected so much by the interface diffusion, if any, and the lattice mismatching between the LnBaCuO-based oxide super-conducting thin film and the cubic Y2O3 is such a magnitude that epitaxial growth can be performed.
申请公布号 JPH04170393(A) 申请公布日期 1992.06.18
申请号 JP19900299419 申请日期 1990.11.05
申请人 KOKUSAI CHIYOUDENDOU SANGIYOU GIJIYUTSU KENKIYUU SENTAA;MITSUBISHI HEAVY IND LTD 发明人 OISHI AKIRA;MORISHITA TADATAKA
分类号 C01G3/00;C01G1/00;C30B11/00;C30B23/02;C30B25/02;C30B29/22;H01L39/24 主分类号 C01G3/00
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