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发明名称
CHARGED PARTICLE BEAM LITHOGRAPHY
摘要
申请公布号
JPH0475319(A)
申请公布日期
1992.03.10
申请号
JP19900189749
申请日期
1990.07.18
申请人
JEOL LTD
发明人
SUGATA MASANORI
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
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地址
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