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发明名称
FILM CARRIER TAPE
摘要
申请公布号
JPH03195034(A)
申请公布日期
1991.08.26
申请号
JP19890337421
申请日期
1989.12.25
申请人
NEC CORP
发明人
YAMASHITA TSUTOMU
分类号
H01L21/60;H01L21/66
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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