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经营范围
发明名称
ETCHING DEVICE
摘要
申请公布号
JPH03188626(A)
申请公布日期
1991.08.16
申请号
JP19890327900
申请日期
1989.12.18
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OKAFUJI MICHIKO;TAKEDA YOSHIYA;ISHIHARA SHINICHIRO
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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