MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19890308422-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPH03166727(A)	申请公布日期	1991.07.18
申请号	JP19890308422	申请日期	1989.11.27
申请人	SEIKO INSTR INC	发明人	TAMAGAWA ATSUSHI
分类号	H01L29/78;H01L21/265;H01L21/304;H01L21/316	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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