AUTOMATIC HIGH-SPEED OPTICAL INSPECTION DEVICE

摘要

PURPOSE: To detect the smaller region of a material lacked in the conductivity by imaging the region of a uniformly illuminated substrate with a time delay integrating sensor to compare the imaged region with the prestored desired characteristics of the substrate. CONSTITUTION: A region to be inspected on the surface of a substrate 14 is nearly uniformly illuminated by an optical illuminator 20 and imaged by a time delay integrating sensor 24 so that thr observation image on the surface is converted to an electric signal to be sent to a picture image processor 25. The processor 25 responds to a RAM 32 for storing characteristics of pattern design on the surface of the substrate 14 and the sensor 24 to compare the images region of the substrate 14 with desired characteristics stored in the substrate 14 for detecting defects. Thus, an apparent mottled pattern on the roughly composed surface can be reduced optically to avoid the averaging of large areas, so that smaller regions of a material lacked in the conductivity can be detected.