| 摘要 |
<p>PURPOSE:To detect the slope angle of semiconductor pellets arranged at a micro interval by providing a graphic contracting circuit, and deleting a horizontal bit pattern window and a horizontal bit pattern extracting circuit. CONSTITUTION:A binary video signal obtained from a graphic contracting circuit 12 specifies a vertical bit pattern window circuit 13, a window circuit 15 and the one side of the circuit 15, and inputs them to a line window circuit 17 having its processing region. A window 30 is controlled by the circuit 15, larger by a predetermined length than the binary image graphic of the contracted semiconductor pellet, and windows 30a, 30b are so disposed as to be symmetrical to a line crossing perpendicularly to the center of a vertical bit pattern window 20. A window counter 16 counts white bits in the windows 30, 30a, 30b, and line windows LM1, LM2 are specified at one sides of the windows 30a, 30b by the circuit 17. A line counter 18 counts the white bits of the windows LM1, LM2.</p> |
