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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03104219(A)
申请公布日期
1991.05.01
申请号
JP19890242993
申请日期
1989.09.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
SHIMIZU MASAHIRO;YAMAGUCHI TAKEHISA;OSAKI AKIHIKO
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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