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经营范围
发明名称
VAPOR GROWTH METHOD
摘要
申请公布号
JPH0380188(A)
申请公布日期
1991.04.04
申请号
JP19890216400
申请日期
1989.08.22
申请人
SUMITOMO METAL IND LTD
发明人
YAMAMOTO TOSHIRO
分类号
C30B25/18;C30B29/42;H01L21/205
主分类号
C30B25/18
代理机构
代理人
主权项
地址
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