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发明名称
MICROWAVE PLASMA TREATING DEVICE
摘要
申请公布号
JPH0328379(A)
申请公布日期
1991.02.06
申请号
JP19890162944
申请日期
1989.06.26
申请人
FUJI ELECTRIC CO LTD
发明人
SHIMIZU AKIO
分类号
B01J19/08;C23C16/50;C23C16/511;H01L21/205;H01L21/31
主分类号
B01J19/08
代理机构
代理人
主权项
地址
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