CLEANING MECHANISM OF ASHER DEVICE,申请号JP19890137931-传众专利搜索

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发明名称	CLEANING MECHANISM OF ASHER DEVICE
摘要
申请公布号	JPH033313(A)	申请公布日期	1991.01.09
申请号	JP19890137931	申请日期	1989.05.31
申请人	MITSUBISHI ELECTRIC CORP	发明人	TSUKAGUCHI SANENORI;OSAKI SABURO;FUKUMOTO HAYAAKI
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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