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发明名称
Apparatus for producing semiconductors
摘要
申请公布号
US4979465(A)
申请公布日期
1990.12.25
申请号
US19890457140
申请日期
1989.12.26
申请人
DAIDOUSANSO CO., LTD.
发明人
YOSHINO, AKIRA;OKUMURA, KENJI;OHMORI, YOSHINORI;OHNISHI, TOSHIHARU
分类号
C23C16/44;C23C16/455;C30B25/14
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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