| 摘要 |
<p>PURPOSE:To increase the non-linearity index alpha by a method wherein the title non-linearity voltage resistance element is provided with a substrate an electrode layer formed thereon, a composite layer comprising a ZnO layer held between two metallic oxide layers on the electrode layer and another electrode layer on the topmost part of the composite layer. CONSTITUTION:A lower electrode 3 is formed by evaporating nickel on a glassy substrate 1 and then a metallic oxide layer 4 is formed on the electrode 3 using a sintered body comprising a praseodymium oxide and a cobalt oxide as a target. Furthermore, a ZnO layer 5 in almost 1mum thick is formed using a ZnO sintered body as another target; next, another metallic oxide layer 6 is formed using the said sintered body comprising the praseodymium oxide and the cobalt oxide as the other target; next an upper electrode 7 is formed by evaporating nickel. Through these procedures, the flatness of the ZnO layer 5 can be enhanced by forming the layer 5 after forming the metallic oxide layer 4, consequently the unfavorable effect on the non-linearity in the current voltage characteristics can be averted thereby enabling the non-linearity index alpha to exceed 30.</p> |
