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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH02181925(A)
申请公布日期
1990.07.16
申请号
JP19890001603
申请日期
1989.01.07
申请人
MITSUBISHI ELECTRIC CORP
发明人
KASAI NOBUYUKI;SONODA TAKUJI;HAYASHI KAZUO
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
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地址
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