| 摘要 |
PURPOSE:To supply gas of always a specified and desired oxygen concn. to an atmosphere device by disposing a reference gas supplying device, an oxygen concn. controller, the atmosphere device, and an oxygen concn. measuring instrument provided on the downstream side, etc., of the atmosphere device, etc., to the above-mentioned system. CONSTITUTION:The oxygen concn. in the gas connected to a cylinder 21 for gaseous N2, etc., as the reference gas supplying device is controlled by manually controlling the voltage, heating temp., etc., in the oxygen concn. controller 23 while observing the oxygen concn. value displayed on a display device 26 of the oxygen concn. measuring instrument 25 provided on the downstream side of the atmosphere device 24, by which the specified oxygen concn. is obtd. The same effect is obtainable even if the above-mentioned device 25 is provided between the cylinder 21 and the controller 23 on the upstream of the device 24 or between the controller 23 and the device 24. The gas of always the specified and desired oxygen concn. is supplied to the device 24 in this way. |
