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发明名称
INSPECTION OF VACUUM PRODUCT
摘要
申请公布号
JPH02130444(A)
申请公布日期
1990.05.18
申请号
JP19880285340
申请日期
1988.11.10
申请人
KUBOTA LTD
发明人
YAMAZAKI HIROSHI
分类号
G01M3/32;G01M3/20
主分类号
G01M3/32
代理机构
代理人
主权项
地址
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