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发明名称
STRAHLUNGSREFLEKTOR FUER DIE HOCHTEMPERATURBEHANDLUNG VON HALBLEITERSCHEIBEN
摘要
申请公布号
DD278366(A1)
申请公布日期
1990.05.02
申请号
DD19880323438
申请日期
1988.12.19
申请人
AKADEMIE DER WISSENSCHAFTEN DER DDR,DD
发明人
HENRION,WOLFGANG,DD;MOHR,ULRICH,DD;HADAMOVSKY,HANS-FRIEDRICH,DD
分类号
C30B31/00;H01L21/22;(IPC1-7):C30B31/00
主分类号
C30B31/00
代理机构
代理人
主权项
地址
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