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发明名称
TEST FACILITATION DESIGN RULE VERIFYING DEVICE
摘要
申请公布号
JPH0293867(A)
申请公布日期
1990.04.04
申请号
JP19880245962
申请日期
1988.09.30
申请人
TOSHIBA CORP
发明人
NISHI HIROAKI
分类号
G01R31/28;G06F11/26;G06F17/50;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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