发明名称 LIQUID CRYSTAL MASK FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 PURPOSE:To decrease the number of sheets of masks and to facilitate handling by sealing a liquid crystal between both glass plates, disposing polarizing plates respectively to the outer side of the two glass plates and allowing selective energization to plural patterned electrodes. CONSTITUTION:The common thin-film electrode 3 and the patterned thin-film electrodes 4 are formed to the respective opposite surfaces of a pair of the glass plates 1, 2 disposed to face each other in parallel. Terminals 3a, 4a re led out of the respective electrodes 3, 4. A hermetic state is maintained between the glass plates 1 and 2 and the liquid crystal 5 is sealed therein; further, the polarizing plates 6, 7 which are respectively directed in the same directions are integrally disposed to the outer side faces of the glass plates 1, 2. Energization is selectively executed between the respective terminals 3a and 4a of the common thin-film electrode 3 and the arbitrarily patterned thin-film electrodes 4, by which the polarization characteristic of the liquid crystal 5 existing between the electrodes is changed and the transparency of the polarized light is limited. The common use of plural sheets of the masks with one sheet of the mask is possible in this way and the handling of the masks is facilitated.
申请公布号 JPH0293536(A) 申请公布日期 1990.04.04
申请号 JP19880246508 申请日期 1988.09.30
申请人 NEC YAMAGATA LTD 发明人 SHIDA NAOYUKI
分类号 G03F1/54;H01L21/027 主分类号 G03F1/54
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