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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0290537(A)
申请公布日期
1990.03.30
申请号
JP19880240984
申请日期
1988.09.28
申请人
HITACHI LTD
发明人
KETSUSAKO MITSUNORI;SHIGENIWA MASAHIRO;KUSUKAWA KIKUO
分类号
H01L29/78;H01L21/20;H01L21/263;H01L21/336;H01L21/8238;H01L27/092;H01L29/786
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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