发明名称 Copper-exuding boroaluminosilicate glasses
摘要 There is disclosed a family of low dielectric, copper-exuding, boroaluminosilicate glasses particularly adapted to use in forming substrates for electronic devices such as integrated circuits. The glasses are capable of exuding copper oxide, have a coefficient of thermal expansion of 30-35x10-7 at 300 DEG C., a dielectric constant not over 5.0 at 100 KHz, a loss tangent not over 0.003 at 100 KHz and consist essentially, in percent by weight, of 56-64% SiO218-25% B2O3, 3-11% Al2O3, 0-2% CaO, 0-2% Li2O, 0-1% K2O, the Li2O+K2O+CaO being 1.5-3% and 1-20% CuO.
申请公布号 US4898767(A) 申请公布日期 1990.02.06
申请号 US19880212478 申请日期 1988.06.28
申请人 CORNING INCORPORATED 发明人 FONG, GERALD D.;HULTMAN, SHERYL L.
分类号 C03C3/091;C03C17/06;C03C23/00;H01L21/48;H01L23/15;H05K1/03;H05K3/10 主分类号 C03C3/091
代理机构 代理人
主权项
地址