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发明名称
CHARGED PARTICLE BEAM EQUIPMENT
摘要
申请公布号
JPH01255141(A)
申请公布日期
1989.10.12
申请号
JP19890028790
申请日期
1989.02.09
申请人
PHILIPS GLOEILAMPENFAB:NV
发明人
BOOUE BERUGAA;HENDORIKU NIKORASU SURINHERURANDO
分类号
H01J37/20;H01J37/09;H01J37/141;H01J37/16
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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