| 摘要 |
PURPOSE:To improve the reliability of an apparatus, by causing the direction of displacement of a driven body to intersect perpendicularly to the driving direction of an actuator via a leaf spring. CONSTITUTION:A precision driver is composed of a pair of parallel-arranged beltlike piezoelectric bimorphs 1-2, a circular sheet leaf spring 3 connected with each one end of said bimorphs, a fixing member 4, and a power source 5. Said piezoelectric bimorphs 1-2 are manufactured by adhesion of flat piezoelectric plates 6-7 in such manner that they are identical with each other in the direction of polarization P, and provided with surface electrode terminals 8-9 on the outside surface side and with an intermediate electrode 10 at the fundamental end on the fixing member 4 side. Further, a driven body 11 is fitted in the central part of said leaf spring 3. Thus, because the driving direction 12a-12b of said piezoelectric bimorphs 1-2 and the direction of displacement 13a-13b of said driven body 11 intersect perpendicularly to each other, the rigidity of an apparatus becomes higher and the residual vibration of the driven body 11 accompanying its drive is prevented from developing. |
