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发明名称	ION IMPLANTATION AND DEVICE THEREFOR
摘要
申请公布号	JPH01211840(A)	申请公布日期	1989.08.25
申请号	JP19880035096	申请日期	1988.02.19
申请人	OKI ELECTRIC IND CO LTD	发明人	FUKUDA HISASHI
分类号	H01J37/08;G01N37/00;G01Q30/02;G01Q60/10;H01J37/28;H01J37/317;H01L21/265	主分类号	H01J37/08
代理机构		代理人
主权项
地址

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