发明名称 INSPECTION INSTRUMENT FOR TERMINAL NONSOLDERING
摘要 PURPOSE:To confirm the nonsoldering of an internal terminal which can not be viewed directly by vibrating an unsoldered terminal from the outside with an impulsive external force, propagating attenuating vibrations of natural vibration frequency to a total reflecting mirror fitted to a body to be tested, and modulating laser light. CONSTITUTION:A laser oscillator 1 supplies monochromatic light as a stable, uniform-phase light source. This light is branched by a half-mirror into two, and one passes through a total reflecting mirror 2 and a reflecting mirror 3 to reach an optical sensor 9. The other passes the reflecting mirror 3 as it is and is reflected by a total reflecting mirror 5 fitted directly to an element 6 to be tested through a total reflecting mirror 4 to reach the sensor 9 through the reflecting mirrors 4 and 3. Two light beams in different optical paths are therefore guided to the sensor 9, the vibrations of the element 6 which are excited with a hammer 7 modulate one light beam, so they interfere with each other, so that intensity variation is observed. This signal is amplified 10, information on the vibration is analyzed 11, and the result is stored 12. This information is read the outside to detect nonsoldering.
申请公布号 JPH01131438(A) 申请公布日期 1989.05.24
申请号 JP19870289922 申请日期 1987.11.16
申请人 NEC CORP 发明人 ITO HIROO
分类号 H01L21/66;G01N21/88;G01N21/956 主分类号 H01L21/66
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