| 摘要 |
PURPOSE:To prevent the generation of a poisonous gas, to inhibit the lowering of a laser output and to obtain the laser output stable for a prolonged term by coating the surface of a discharge limiting material with an inorganic insulator, which does not change a composition on the mixing of a laser medium gas. CONSTITUTION:When high-frequency high voltage is applied to a pair of dielectric electrodes 11, an intense silent discharge is generated from a discharge limiting material 16, fillers 17 and the surfaces of the electrodes 11 not coated with an inorganic insulator 19, and the surface of the insulator 19 in the vicinity of the electrodes 11 is exposed to the silent discharge. Consequently, the titled gas laser device is constituted so that each surface of the limiting material 16 and the fillers 17 as the generating sources of a poisonous gas is coated with the inorganic insulator 19, which does not generate the poisonous gas even when it is exposed to silent discharge. As a result, no poisonous gas is generated because the limiting material 16 and the fillers 17 are protected from the heat of silent discharge and an electron bombardment, thus preventing the change of a composition on the mixing of a laser medium gas. Accordingly, a laser output does not lower, and the stable laser output is obtained. |
