摘要 |
PURPOSE:To make it possible to use, mechanically and stably, a superconducting material having high phase transition temperature for a wiring material and form a fine wiring pattern by forming grooves based on a pattern using a photolithography. CONSTITUTION:Powder 2 of superconducting material having preferable supercon ductivity is formed in paste and a pattern is formed on a substrate using the paste, thereafter being burnt, to thereby obtain a superconductive wiring. The pattern is formed by the grooves on the surface of a substrate using a photoli thography method. A compound oxide having a composition which is represented in a general formula alphaw, betax, gammay, deltaz is used as the superconducting material, wherein an element alpha is one kind of IIa group in the periodic table, an element betais one kind of IIIa group in the periodic table, an element gamma is one kind of Ib, IIb, IIIb, VIIIa groups in the periodic table, an element delta is O and w, x, y, z are in the relationship of 1<=w<=5.1<=x<=5.1<=y<=15.1<=z<=20. |