发明名称 FORMATION OF SUPERCONDUCTIVE WIRING PATTERN
摘要 PURPOSE:To make it possible to use, mechanically and stably, a superconducting material having high phase transition temperature for a wiring material and form a fine wiring pattern by forming grooves based on a pattern using a photolithography. CONSTITUTION:Powder 2 of superconducting material having preferable supercon ductivity is formed in paste and a pattern is formed on a substrate using the paste, thereafter being burnt, to thereby obtain a superconductive wiring. The pattern is formed by the grooves on the surface of a substrate using a photoli thography method. A compound oxide having a composition which is represented in a general formula alphaw, betax, gammay, deltaz is used as the superconducting material, wherein an element alpha is one kind of IIa group in the periodic table, an element betais one kind of IIIa group in the periodic table, an element gamma is one kind of Ib, IIb, IIIb, VIIIa groups in the periodic table, an element delta is O and w, x, y, z are in the relationship of 1<=w<=5.1<=x<=5.1<=y<=15.1<=z<=20.
申请公布号 JPH0197320(A) 申请公布日期 1989.04.14
申请号 JP19870254967 申请日期 1987.10.09
申请人 SUMITOMO ELECTRIC IND LTD 发明人 ISHIDA TETSUYA;YATSU SHUJI;JODAI TETSUJI
分类号 H01L39/24;C01G1/00;C04B35/00;C04B35/45;C04B41/87;H01B12/06;H01B13/00;H01L39/12;H05K1/09 主分类号 H01L39/24
代理机构 代理人
主权项
地址