METHOD OF MANUFACTURING MASK

摘要

The embodiment of the present invention is to reduce damage to a fixing plate which supports a mask substrate in manufacturing a mask, and to reduce the generation of defects such as deformation or bending of a mask substrate. A method for manufacturing a mask according to the embodiment of the present invention may include a step of arranging the mask substrate of a thin film in a process position, a step of forming a coating layer which includes a dissolution material for cleaning on one surface of the mask substrate, a step of forming a deposition pattern on the other surface of the mask substrate, and a step of removing a coating layer on the mask substrate having the deposition substrate.