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经营范围
发明名称
MANIPULATOR FOR STANDARD MECHANICAL INTERFACE APPARATUS.
摘要
申请公布号
EP0238541(A4)
申请公布日期
1989.03.21
申请号
EP19860905573
申请日期
1986.08.25
申请人
ASYST TECHNOLOGIES
发明人
BONORA, ANTHONY, CHARLES;O'SULLIVAN, ANDREW, WILLIAM
分类号
B65G47/90;B65D85/86;B65G47/52;B65G49/00;B65G49/07;H01L21/02;H01L21/673;H01L21/677;H01L21/68;(IPC1-7):B65G47/52
主分类号
B65G47/90
代理机构
代理人
主权项
地址
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