| 摘要 |
A bi-directional drive motor of the type having a force coil suspended in a magnetic field of a magnetic core assembly is provided. The force coil is made larger than the center pole piece which it surrounds so that the force coil is movable transverse to the length of the center pole piece as well as along its length to provide both X and Y directional movement. When two force coils are connected together on orthogonal axes and mounted in a common magnetic core assembly, X and Y directional movement is provided in a single drive motor system. When two drive motor systems are coupled to the same side of a top stage of a load platform, rotational or theta positioning is provided in addition to X and Y positional movement.
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