| 摘要 |
<p>PURPOSE: To precisely detect the position of a mobile object to be carried by a robot by providing an array sensor for generating a signal, while being selectively triggered by moving the top end and rear end of the object and a means for positioning a wafer with respect to a point selected in response to this signal. CONSTITUTION: This device is composed of the sensor array composed of a plurality of sensors 61-63, with which output signals are applied, for supplying an output signal expressing the position of a wafer 15 related to this trigger sensor point, while triggering these sensors 61-63 at the top end and rear end of the moving object, means for calculating the position of the wafer 15 with respect to the point selected in response to the output signal, and means for moving a holder and the object positioned on this holder to the selected point in response to the calculated relative position of the object. Thus, required positional information is possessed and actually utilized for moving the wafer 15, and the required extremely precise positional information can be provided without stopping the movement of the robot.</p> |
