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发明名称
ASSEMBLY SYSTEM OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6448431(A)
申请公布日期
1989.02.22
申请号
JP19870206160
申请日期
1987.08.18
申请人
SONY CORP
发明人
ONDA KEIICHIRO;UCHIKOBA SATOSHI
分类号
H01L21/52;H01L21/50;H01L21/68;H01L23/50
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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