| 摘要 |
PURPOSE:To obtain an excellent converging efficiency constantly through eliminating the divergence in the locational relation by integrating a grazing incidence mirror into the body of a target for generating an X-ray. CONSTITUTION:On the internal surface of a through hole in a mirror 36 are provided the No.1 mirror 17 and the No.2 mirror 18 so that a grazing incidence mirror is formed. The circular protruding portion 35a of a target body 35 is engagingly inserted into the No.1 mirror 17. Adhesion planes are metallized respectively, and then, the metallized planes are alloyed with each other so that they are locked. Subsequently, the protruding portion 35a is planed off so that the center 31a and the mirrors 17, 18 are put in a prescribed relation. The material for the target body 35 depends upon what the wavelength of the X-ray to be produced can be obtained, while, for the material for the mirror 36 is suitable a substance consisting of heavy elements. To the internal surface of the mirrors 17, 18 is applied Au so that the reflectance is improved, and then, a completed target 33 is placed on a cooling unit 14. In the case of this target, the locational relation between the body and the grazing incidence mirrors will not diverge, and an excellent converging efficiency can be obtained constantly. Even if the wavelength of X-ray is varied by an interchange, a high converging efficiency can be obtained continually. |
