发明名称 VOLTAGE DETECTING APPARATUS
摘要 <p>PURPOSE:To make the change in reflectivity of an electrooptical material uniform and to make the polarizing state of a light beam to correspond to the voltage of a part to be measured accurately, by providing a transparent electrode on the opposite side of a part, where the reflecting means comprising an electrooptical material in an optical probe is provided. CONSTITUTION:An electrooptical material 62' whose tip part 63 has a truncated cone shape is provided in an optical probe 1. A reflecting mirror 65, which reflects incident light IB as output light RB, is provided at the tip part 63. A transparent electrode 2, on which a reflection preventing film is evaporated, is provided on the upper part of the electrooptical material 62' so that the electrode is perpendicular to a central axial line A-A' of the optical probe. The transparent electrode 2 is kept at the ground potential. Thus, electric lines of force ELN1, which are generated between the potential of the reflecting mirror 65 induced by the voltages at the INAR part and the OTAR part of a material to be measured 6 and the ground potential of the transparent electrode 2, are made uniform. The change in reflectivity of the electrooptical material 62' is made uniform along the entire length.</p>
申请公布号 JPS63305258(A) 申请公布日期 1988.12.13
申请号 JP19870142062 申请日期 1987.06.05
申请人 HAMAMATSU PHOTONICS KK 发明人 TAKAHASHI HIRONORI;AOSHIMA SHINICHIRO;TSUCHIYA YUTAKA
分类号 G01R15/24;G01R19/00;G01R31/302;H01L21/66 主分类号 G01R15/24
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