| 摘要 |
PURPOSE:To obtain an optical connection circuit capable of positioning between light emitting channels and optical waveguides at their height direction, lateral direction and inclination on a substrate face without adjustment at the time of mounting a light emitting element, being easily mounted and improving its productivity by engaging projection parts of the light emitting element with guide grooves formed on a substrate. CONSTITUTION:Plural optical waveguides 2 and plural guides grooves 7 having the same center axes as that of respective waveguides 2 are formed on the silicon substrate 1. Each optical waveguide 2 consists of a core layer 12 and a buffer layer 11 and each guide groove 7 is positioned on an extension line from one end of each optical waveguide 2 and forming a metal film 10 for fusing/electrode tacking-out on its bottom. Plural projection parts 9 are formed around respective light emitting channels 8 on the (p) side of an LD 5 to be an end face emission type light emitting element. The guide grooves 7 and projection parts 9 are formed so that both the parts are accurately engaged with each other and the center axes of the optical waveguides 2 coincide with the channels 8 of the LD 5. Since the projection parts 9 and the guide grooves 7 are previously formed on the light emitting element and the optical waveguide substrate 1, the light emitting element can be adjustlessly and accurately packed. |
