| 摘要 |
<p>A laser oscillator which establishes r-f discharge by applying an r-f voltage to a plurality of discharge regions via a dielectric member in order to realize laser oscillation. The laser oscillator has r-f power sources (26a, 26b) and further has current detectors (CT2a, CT2b), arranged to detect currents flowing through discharge tubes (1) and mutual current flowing between the neighboring discharge tubes. The currents of the current detectors (CT2a, CT2b) are used as feedback currents to prevent the combination current from getting out of control. Also provided is a means for preventing interference in the discharge regions.</p> |
