发明名称 |
Source of ions with at least two ionization chambers, in particular for forming chemically reactive ion beams |
摘要 |
The ion source comprises a cathode, an intermediate electrode and an anode with two ionization chambers between these electrodes, means for producing an axial magnetic field, means for applying a DC voltage between an intermediate electrode and the anode, ion extraction means and an alternating voltage generator between the cathode and the intermediate electrode.
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申请公布号 |
US4782235(A) |
申请公布日期 |
1988.11.01 |
申请号 |
US19860914547 |
申请日期 |
1986.10.01 |
申请人 |
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE |
发明人 |
LEJEUNE, CLAUDE;GILLES, JEAN P. |
分类号 |
H01J27/18;(IPC1-7):H01J27/02 |
主分类号 |
H01J27/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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