| 摘要 |
PURPOSE:To make pollution of a sample due to a heavy metal and any damage to an electrode preventable even if a deflection angle of an ion beam is made larger, by constituting a thermion emitting source and a thermion control device, holding an ion beam orbit each in between, so as to be opposed to a surface to be formed by a displaced locus by deflection of the ion beam. CONSTITUTION:A thermion emitting source 11 supplying an ion beam 15 with a thermion 14 and electron control devices 12 and 13, holding an ion beam locus each in between, are constituted so as to be opposed to a surface C to be formed by a displaced locus by deflection of the ion beam 15. In the displacing direction by the deflection of the ion beam 15, a distance from the beam orbit can be made longer, and even if a deflecting angle of the ion beam 15 is made larger, the ion beam 15 is in no case made contact with these thermion control devices 12 and 13. With this constitution, the deflecting angle can be made larger, and even in case of a sample large in a caliber, pollution due to a heavy metal and any damage to an electrode are all preventable.
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