| 摘要 |
PURPOSE:To improve the soft magnetic characteristic of a soft magnetic ferrite thin film and to particularly attain 10 (Oe) or less of coercive force by setting a film composition in a predetermined range. CONSTITUTION:When the film composition of an MnZn ferrite thin film formed by a method, such as a sputtering or a vacuum depositing, etc., is represented by the formula I, the range of the composition is set by a formula 0.20 <= x <=0.30, 0.50 <= 1-x-y <= 0.54. In the formula I, x, y indicate molar ratios. Thus, 10 (Oe) or less of coercive force is attained. When the range of the composition is set by a formula 0.2 <= x <= 0.26, extremely low coercive force of 0.5 (Oe) or less is attained. |
