| 摘要 |
PURPOSE:To fix samples of various kinds of sizes with one kind of sample holder, generate uniform clamp force independently of the size of sample, reduce the cost, and prevent the exfoliation of resist, by providing a plurality of clamp bars movable with respect to a main body for mounting samples with a plurality of pressing mechanisms, and fixing the samples to the main body with these pressing mechanisms. CONSTITUTION:When a sample 12 is fixed to a sample holder 11, the positions of two clamp bars in the right and left direction are determined according to the size of the sample 12. After a press member 20 is removed, two clamp bars 18 are rotated about 90 counterclockwise, and the sample 12 is mounted on the main body 13, the clamp bars 18 are rotated clockwise and the press member 20 is set. Thus the sample 12 is automatically clamped. In the case of small size, suitable measure is taken by moving inward one clamp bar 18 or two clamp bars 18 in accordance with the size. |
