SEMICONDUCTOR MANUFACTURING APPARATUS,申请号JP19860249055-传众专利搜索

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发明名称	SEMICONDUCTOR MANUFACTURING APPARATUS
摘要
申请公布号	JPS63105409(A)	申请公布日期	1988.05.10
申请号	JP19860249055	申请日期	1986.10.20
申请人	SEIKO EPSON CORP	发明人	IWAMOTO KOICHI
分类号	H01L21/3205;H01B13/00	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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