VAPOR GROWING APPARATUS,申请号JP19860206913-传众专利搜索

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发明名称	VAPOR GROWING APPARATUS
摘要
申请公布号	JPS6365083(A)	申请公布日期	1988.03.23
申请号	JP19860206913	申请日期	1986.09.04
申请人	FUJITSU LTD	发明人	OBA TAKAYUKI
分类号	H01L21/31;C23C16/46;H01L21/205	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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