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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPS634058(A)
申请公布日期
1988.01.09
申请号
JP19860148833
申请日期
1986.06.24
申请人
MATSUSHITA ELECTRIC WORKS LTD;SHINCHIYOU PLAST SHOMEI KK
发明人
NOGUCHI SHINJI;NAKAO YOUTAROU
分类号
C23C14/24;C23C14/22;C23C14/50
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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