发明名称 WAFER SCALE INTEGRATED CIRCUIT DEVICE
摘要 PURPOSE:To enable the inspection of each integrated circuit even when integrated circuits, power supplies thereof are short-circuited, are included in plurality of the integrated circuits connected to a common power line by inserting fuses to each of power circuits for supplying electric power in order to inspect a plurality of the integrated circuits. CONSTITUTION:A power line 2 is used for a test circuit, supplied with electric power from a common introducing section 21 and branched toward each integrated circuit 1, and fuses 3 are inserted to a branch circuit 22. When the power line for the circuit for a test is supplied with electric power on inspection, the fuse 3 for the branch circuit 22 corresponding to the integrated circuit 1, in which there is a short-circuit point in a power circuit, is fusion-cut, the integrated circuit 1 is removed, and other integrated circuits 1 are supplied normally with electric power, thus resulting in regular inspection.
申请公布号 JPS62194641(A) 申请公布日期 1987.08.27
申请号 JP19860036327 申请日期 1986.02.20
申请人 FUJITSU LTD 发明人 KUBOSAWA HAJIME
分类号 H01L21/66;H01L21/82;H01L21/822;H01L27/04 主分类号 H01L21/66
代理机构 代理人
主权项
地址