| 摘要 |
PURPOSE:To obtain a work having stable characteristics by controlling the concn. of a pattern forming agent dissolved in a developing soln. thereby executing good development and automatically exchanging the developing soln. CONSTITUTION:The work 4 is immersed in the developing soln. A sensor 5 which is a detecting part of measuring means such as visible and UV photometers, refractometer, COD measuring instrument of DOC measuring instrument is dipped and provided in the developing soln. Whether the developing soln. is usable or not is judged by the concn. of the pattern forming agent detected by the sensor 5, by which the soln. control is executed. A display part 7 which displays the concn. of the pattern forming agent, a recording part 8 which records the concn. of the pattern forming agent, an alarm part 9 which alarms the increase of the concn. of the pattern forming agent when said concn. increases to the value above the prescribed value (permissible value) and selector valves 10, 11 are connected to the control part 6. The selector valve 10 is interposed in a discharge pipe 12 to discharge the developing soln. in a developing tank 1 and the selector valve 1 is interposed into a supply pipe 14 to supply the fresh developing soln. 2 from a storage tank 13 into the developing tank 1. |
