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发明名称
摘要
申请公布号	JPS6231991(B2)	申请公布日期	1987.07.11
申请号	JP19830240698	申请日期	1983.12.20
申请人	VICTOR COMPANY OF JAPAN	发明人	TSURUKUBO TAKASHI
分类号	B05C11/08;G03C1/74;G03F7/11;G03F7/16;H01L21/027	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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