| 摘要 |
PURPOSE:To obtain a digital type microscopic displacement element capable of being driven on a low voltage by a method wherein a laminated material is constituted using a material which is subject to phase-transition from an antiferroelectric phase into a ferroelectric phase when an electric field is impressed and also, the laminated material is made into a structure wherein each layer can be independently driven. CONSTITUTION:A ceramic displacement element is made into a structure wherein layers 11 of an antiferroelectric material, which is phase-transformed into a ferroelectric phase when an electric field is impressed, and layers 12 of an insulating material are alternately laminated through electrode layers 13, each electrode 13 is connected to a common electrode 14 in every one layer and other electrode layers are each connected to independent electrodes 15-21. For example, the plates 11; which are each provided with the metal electrode films 13 on both main surfaces, are equal in thickness and consist of a Pb0.99Nb0.02[(Zr0.6Sn0.4)0.94 Ti0.06]0.98 antiferroelectric substance ceramics; are laminated in the plate thickness direction through the insulators 12. The lower electrode of each plate 11 is electrically connected and is led out as the common terminal 14 and the electrode terminals 15-21 are independently led out from the upper electrode of each plate 11. When an electric field of the critical electric field or higher which causes a phase transition in an ferroelectric substance is impressed on an arbitrary layer, the layer is generated a constant displacement in the plate thickness direction and if the number of the layers which are driven is changed, the amount of displacement to generate is also digitally changed. |
