| 摘要 |
PURPOSE:To obtain the titled body having a less tendency for generating a phenomenon which can not give an image at all, namely an image run in a high humidity atomosphere by controlling the average roughness of a center line on a surface to >=90Angstrom measured by a coordinate measuring by means of a coordinate measuring scanning electron microscope and a cross-section measuring apparatus. CONSTITUTION:The surface roughness of the sensitive body due to polishing is controlled by a polishing period, if polishing conditions such as a pressure, etc., are a prescribed value. When the polishing period is too long, the roughness of the surface depresses. If the average roughness of the center line on the surface of the sensitive body is <=90Angstrom , preferably <=60Angstrom , further preferably <=30Angstrom , the remarkable effect is obtd. Thus the a-Si photosensitive body is necessary to satisfy the condition about the average roughness of the center line, but it is preferable to satisfy the following condition, namely the average of the optional ten measurements about the distribution of the average of the roughness of the center line is <=110Angstrom , preferably <=80Angstrom , further preferably <=50Angstrom , and the average of the optional ten measurements about the max. amplitude is <=500Angstrom , preferably <=350Angstrom , further preferably <=200Angstrom . |
