| 摘要 |
PURPOSE:To decrease loss and to improve stability by providing a metal diffused layer down to a desired depth from the boundary of a chalcogenide glass layer in contact with a thin metallic film layer. CONSTITUTION:The chalcogenide glass layer 2 provided on a substrate 1 and the thin metallic film layer 3 formed on the chalcogenide glass layer are provided. This optical waveguide element 6 is provided with the metal diffused layer down to the desired depth from the boundary of the chalcogenide glass layer 2 in contact with the thin metallic film layer 3. Such optical waveguide element is formed by forming the chalcogenide glass layer 2 on the substrate 1, forming the thin metallic film 3 on the chalcogenide glass layer and irradiating an electron beam 4 onto the thin metallic film thereby forming the metal diffused layer 5 down to the desired depth from the boundary of the chalcogenide glass layer 2 in contact with the thin metallic film layer. The optical waveguide 5 having a low loss and good stability is thus easily and inexpensively formed with high accuracy. |
